Argon Gas Sputtering

Argon gas sputtering is a physical vapor deposition technique that uses energized argon ions to remove atoms from a solid target, making it important for producing and modifying thin films in engineering. In a vacuum chamber, an electric field ionizes argon into a plasma; positively charged ions accelerate toward the negatively biased target, ejecting target atoms that travel through the chamber and condense on a substrate. The process can deposit metals, alloys, and other materials as coatings for electronic, optical, mechanical, and protective applications. By adjusting gas pressure, power, substrate conditions, and deposition time, engineers control film thickness, composition, adhesion, and surface properties.

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Education

JoVE Core - Chemistry

Noble Gases

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2020

The elements in group 18 are noble gases (helium, neon, argon, krypton, xenon, and radon). They earned the name “noble” because they were assumed to be nonreactive since they have filled valence shells. In 1962, Dr. Neil Bartlett at the University of British Columbia proved this assumption to be false. These elements are present in the atmosphere in small amounts. Some natural gas contains 1–2% helium by mass. Helium is isolated from natural gas by liquefying the condensable components,...

Mixtures of Gases: Dalton's Law of Partial Pressures and Mole Fractions

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2020

Unless individual gases chemically react with each other, the individual gases in a mixture of gases do not affect each other’s pressure. Each gas in a mixture exerts the same pressure that it would exert if it were present alone in the container. The pressure exerted by each individual gas in a mixture is called its partial pressure. This means that in a mixture containing three different gases A, B, and C, if PA is the partial pressure of gas A; PB is the partial pressure of gas B; PC is the...

Molecular Comparison of Gases, Liquids, and Solids

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2020

Particles in a solid are tightly packed together (fixed shape) and often arranged in a regular pattern; in a liquid, they are close together with no regular arrangement (no fixed shape); in a gas, they are far apart with no regular arrangement (no fixed shape). Particles in a solid vibrate about fixed positions (cannot flow) and do not generally move in relation to one another; in a liquid, they move past each other (can flow) but remain in essentially constant contact; in a gas, they move...

Research

JoVE Journal - Engineering

Fabrication of Bi2Te3 and Sb2Te3 Thermoelectric Thin Films using Radio Frequency Magnetron Sputtering Technique

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Cited by 3 •

2024

The manuscript describes a protocol for radio frequency magnetron sputtering of Bi2Te3 and Sb2Te3 thermoelectric thin films on glass substrates, which represents a reliable deposition method that provides a wide range of applications with the potential for further development.

Research

JoVE Journal - Engineering
Free Sample

Sputter Growth and Characterization of Metamagnetic B2-ordered FeRh Epilayers

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Cited by 23 •

2013

A method to prepare epitaxial layers of ordered alloys by sputtering is described. The B2-ordered FeRh compound is used as an example, as it displays a metamagnetic transition that depends sensitively on the degree of chemical order and the exact composition of the alloy.

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